Fundamentals of microfabrication :
by Madou, Marc J.
Edition statement:2nd ed. Published by : CRC Press, (Boca Raton :) Physical details: 723 p. : col. ill. ; 29 cm. ISBN:0849308267 (alk. paper).
Subject(s):
Microelectronics.
|
Integrated circuits
--
Design and construction.
|
Microelectromechanical systems
--
Design and construction.
|
Machining.
|
Microelectronic packaging.
|
Lasers
--
Industrial applications.
Year: 2002
|
Integrated circuits
--
Design and construction.
|
Microelectromechanical systems
--
Design and construction.
|
Machining.
|
Microelectronic packaging.
|
Lasers
--
Industrial applications.
Online resources:
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
Books
|
National Centre for Radio Astrophysics
Welcome to NCRA- WEB OPAC |
621.366/MAD (Browse shelf) | Available | 16095 |
Includes bibliographical references and index.
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