Fundamentals of microfabrication :
by Madou, Marc J.
Edition statement:2nd ed. Published by : CRC Press, (Boca Raton :) Physical details: 723 p. : col. ill. ; 29 cm. ISBN:0849308267 (alk. paper).
Subject(s):
Microelectronics.
|
Integrated circuits
--
Design and construction.
|
Microelectromechanical systems
--
Design and construction.
|
Machining.
|
Microelectronic packaging.
|
Lasers
--
Industrial applications.
Year: 2002
|
Integrated circuits
--
Design and construction.
|
Microelectromechanical systems
--
Design and construction.
|
Machining.
|
Microelectronic packaging.
|
Lasers
--
Industrial applications.
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| 621.3-5/GRO Electrical feeddrives for machine tools / | 621.3-5/SAA Computational aids in control systems using MATLAB / | 621.3:629(035) U. S. N. Aviation electronic's mate's manual | 621.366/MAD Fundamentals of microfabrication : | 621.3:681.3.06/FRA Electromechanical engineering an introduction / | 621.37 MIL AC network analysis by symbolic algebra | 621.37 MIL Symbolic method of vector analysis :the ''j'' operation simply explained |
Includes bibliographical references and index.
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