Campbell, Stephen A., 1954-
The science and engineering of microelectronic fabrication / Stephen A. Campbell. - 2nd ed. - New York : Oxford University Press, 2004. - xiv, 603 p. : ill. ; 24 cm.
Includes bibliographical references and index.
0195136055
00051022
Semiconductors--Design and construction.
TK7871.85 / .C25 2001
621.3815/2
The science and engineering of microelectronic fabrication / Stephen A. Campbell. - 2nd ed. - New York : Oxford University Press, 2004. - xiv, 603 p. : ill. ; 24 cm.
Includes bibliographical references and index.
0195136055
00051022
Semiconductors--Design and construction.
TK7871.85 / .C25 2001
621.3815/2